Vol 2 Chapter 315: : Photolithography and Etching, the Soul and Spirit of Chip Manufacturing

In the research and development center, a large laboratory closed the anti-theft tempered glass door. When Ye Hua and others approached about three or five meters, the glass door suddenly opened by itself.
At this time, Ye Hua, the head of the R & D center, and an important head of China Microelectronics came to this laboratory together. Various instruments and equipment were immediately exposed to the public's field of vision, especially in the laboratory. At the center, a device with a height of more than four meters and a matrix structure is particularly noticeable.
There are a few young engineers in the laboratory, and Ye Hua, who is wearing a clean suit at this time, did not ask the person in charge of the R & D department for instructions, went directly to the battle, and said to the engineers: "Don't hold on, let's start . "
They hesitated for a moment, before the head of the R & D department silently nodded, and immediately began to work.
Well, here is the laboratory of a microelectronic company. It is reasonable to say that the core technology cannot be "stained" by others, except for Ye Hua. Without him, there would be no domestic EUV lithography machine in front of him.
I saw Ye Hua skillfully opened this lithography machine completely developed by domestic accessories. A cone-shaped funnel-shaped instrument suddenly appeared in the interior. This instrument was hooked on the top, and the cable with wide was densely packed. The outer layer of copper wire surrounds the inside of the naked body. Thousands of parts are densely aligned and linked together to form a precise miniature closed structure. It is very spectacular to see from a small angle.
Ye Hua led five engineers who assisted him in the final commissioning operation. A worker took the sealed box he brought to take out the tin 2D wafer, which was a prepared tin wafer.
The manufacturing process of the chip is very complicated. First, Xianfeng Nano provided a high-purity two-dimensional crystal film of tinene. After absorbing the core technology of Shin-Etsu Chemical in the raw material process, Xianfeng Nano made the Purity has also been raised to the highest level in the world.
It is worth mentioning that in addition to photolithography machines, in addition to photolithography machines, making chips also requires etching machines. If photolithography machines are the soul of chip manufacturing, then etching machines are the chip manufacturing ambitions, and they want to make real high-end process chips. Both must be top-notch.
Prior to this, the development of domestic lithography and etching machines was very embarrassing. It was a severely partial situation. Microelectronics has been able to mass-produce 5 nanometer etching machines, and it has directly entered the world's popular ranks without suspense. The etching machine is also in the experimental stage, but this is the result without Ye Hua's help.
However, whether it is a 90nm lithography machine from Shangdu Microelectronics or a 200nm lithography machine with a shadow speed, it is hard to see the gap between the current state of the art asml's most advanced 5nm process.
These two machines and equipment, simply said that the lithography machine projects the circuit diagram onto the silicon wafer covered with photoresist, of course, now it is a tin wafer, and the etching machine etches away the excess circuit diagram on the chip on which the circuit diagram is drawn. It doesn't seem to be difficult, but there is an image metaphor. The circuit mechanism on each chip is magnified many times, and it is more complicated than the entire quotient. This is the difficulty of photolithography and etching machines.
The process of photolithography is to apply a layer of photoresist on the surface of the tin circle. The so-called photoresist is a gel-like substance that can be corroded by light. Deep UV
Because of the photoresist cover, the irradiated part will be eroded, and the unlit part will be left. This part is the required circuit structure.
The photolithography function of the photolithography machine is similar to that of a camera. The working principle is to expose the chip circuit and function circuit diagram through a patterned photomask to expose the chip of the photolithography machine. The photoresist will change its properties when it sees light. , So that the circuit on the photomask is copied to the chip wafer.
Visually speaking, it is like a flat printing process. Once the architecture plan is determined, as long as the raw materials are sufficient, the mass production of the brush is finished.
There are two types of etching methods, one is dry etching, and the other is wet etching. This time, Microelectronics provided the second etching solution.
As the name suggests, wet engraving is the addition of water during the process. The lithographic wafer is reacted with a specific chemical solution to remove unnecessary parts, and the rest is the circuit structure.
However, dry etching has not yet achieved commercial mass production. The principle is to replace the chemical solution by plasma and remove the unnecessary tin round portion.
China Micro-Semiconductor is also one of the core members of the csac club alliance system, and is also very excited, because it has obtained strong theoretical and technical support from Ye Hua, and the commercialization of plasma etching is already expected in the future.
After the modulation is completed, Ye Hua draws a holographic panel in front of him and outputs a series of instructions to start the automated operation of the lithography machine. The so-called automatic control is to upload and download from the substrate, and the exposure time and cycle are controlled by programs.
In the next time, 34 kinds of chips with different functions will be produced, and the internal integration of a phc machine is exactly 34 kinds of chips, which are basically provided by upstream suppliers. Intel Corporation is just one of them. .
It can be seen that the difficulty of the semiconductor industry is no less than that of Shangqingtian.
It is not difficult to see that in order to get phc out of the dependence of foreign integrated circuit manufacturers, Ye Hua must take the lead in getting csac out. It is only by the coastline company. Even if he opened it, it will not be possible within six months. In five years, it is absolutely impossible to achieve self-sufficiency and self-sufficiency of phc hardware. Even if it is bound to spread a monopoly lawsuit, Xianfeng Nano will inevitably face a spin-off situation, and even the Coastline Group will be split.
But with the csac system, it is not the same. Ye Hua has solved specific technical barriers. Within one to two months, a total of 34 different types of chip samples with different functions will be produced. The integrated circuit manufacturers in the large csac system get their own share for ic design, which is the chip components required by phc, which is 100% domestically supplied ~ EbookFREE.me ~ Some people say that domestic electronic equipment is typical, such as mobile phones. It is assembly, and this time the point of fire strike is phc. The reason is that chips, memory, etc. are all derived from upstream suppliers, and they are overseas suppliers. There are very few things that really belong to them, so the coastline is just an assembly. plant.
In fact, this statement is quite funny. If you follow this statement, not only the coastline is an assembly plant, but Apple is also an assembly plant. Apple ’s mobile phones need to be supplied by Samsung and Qualcomm. They also use Huawei ’s technology. If the profit is comparable, even if the profit is between the middle and the middle, the assembly plant will be so valuable?
The next time, Ye Hua was ready to stay in this microelectronics R & D and production center for a while. Everything is difficult at the beginning. The first phc machine composed of domestic chips is very important. Time is really short.
Under his leadership, the entire csac has performed its duties, using their own unimaginable speed to promote the subversive transformation of the high-end chip localization road. Each member of the csac system now seems to be dreaming, as if Too easy, so impractical, but knowing that this is not a dream.
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